Ⅰ. Предназначение оборудования
Данный станок в основном предназначе для двухстороннего шлифования кремниевого чипа, основной пластины стекла ITO, пластины арсенида галлии, керамического чипа, кварцевого кристалла и других полупроводинковых материалов, также предназначе для точного двухстороннего шлифования других жестких и хрупких материалов.
Ⅱ. Главные технические параметры
1. Размер шлифовального круга: φ640мм×φ235мм×30мм.
2. Параметры кассеты: дюймовый, Z＝108 DP＝12 α=20°
Метрический, Z＝114 M＝2 α=20°
3. Количество кассеты: 5 шт.
4. Минимальная шлифовальная толщина: 0.15 мм.
5. Максимальная шлифовальная толщина: 40 мм.
6. Идеальный шлифовальный диаметр: φ75мм/20 шт.
7. Максимальный шлифовальный диаметр: φ150мм
8. Скорость оборотов нижнего шлифовального круга: 0～56rpm

В нижеследующем описание станка на английском языке:

X61 640B1M-5PT Double-sided Lapping Machine
Machine Application
The machine is mainly used for accurately lapping ceramics, silicon wafers, ITO glass substrate, gallium arsenide, quartz crystal and other semiconductive materials on both sides. It also could be used to process other hard and fragile materials on both sides with high precision.
Main feature
1. It is controlled by PLC with PT display, which could set the working parameters, such as, pressure, time, speed, slow-down pressure and floating time, and the mode through the touching-screen.
2. The design of the machine adopt the world’s newest equipment’s feature in structure, the way of transmission and movement. It absorb many customer’s successful experience in using. Improving the equipment’ accuracy and it is vailing for fixing and maintain. The equipment’s reliability, practicability, interchangeability and operating conveniences.
3. The plates could weigh themselves, in order to keep the same high efficiency unchangeable with the same lapping technic parameters (pressure, time, speed and the granularity, density and the flow rate of the slurry).
4. There are twenty sets of different technics parameter (pressure, time, speed, slow-down pressure and floating time), so that the operator could choose.
5. In order to meet the different requirements, the sun gear of this machine could run not only forward, but also reverse(related to the ring gear and the low plate, selected on the humen-computer interface).
6. Key bought-in components are from world famous manufacturers which makes sure the machines accuracy and reliability.
Main technical parameters
1. Dimensions of lapping plates: φ640mm×φ235mm×30mm
2. Carrier specifications:
British system: Z＝108 DP＝12 α=20°
Metric system： Z＝114 M＝2 α=20°
3. Carrier Quantity: 5 PCS
4. Thickness of work-pieces (Min): 0.15mm
5. Thickness of work-pieces (Max): 40mm
6. Diameter of work-pieces (ideal.): φ75mm/20 PCS
7. Diameter of work-pieces (max.): φ150mm
8. Rotation speed of lower plate: 0～56rpm
9. Main motor: 4kW AC380V 1460rpm
10.Three-phase electric pump: 1/4HP AC380V 70L/min
11. Overall dimensions（L☓W☓H）: 860mm×1300mm×2700mm
12. Weight: about 2000kg
Machine accuracy
1. End face run-out of low plate: ≤0.06mm
2. Flatness of lapping plates: ≤0.015mm
Machine Capacity
1. One-carrier capacity: 4 pieces of φ75mm pieces of φ50mm
2. Total capacity: 20 pieces of /φ75mm 40 pieces ofφ50mm