І. Предназначение оборудования
Данный станок предназначен для двухстороннего шлифования синего стекла, кремниевого чипа, оптического чипа, пластины арсенида галлии, керамического чипа, кварцевого кристалла и других полупроводниковых материалов, также предназначен для двухстороннего шлифования других жестких и хрупких материалов.
Ⅱ. Главные технические параметры
1. Размер шлифования: φ640мм×φ235мм×30мм
2. Параметры кассеты: дюймовый, Z＝108 DP12 α=20°
Метрический, Z＝114 M=2 α=20°
3. Минимальная шлифовальная толщина: 0.20 мм.
4. Максимальная шлифовальная толщина: 30 мм.
5. Шлифовальный диаметр и несущая способность: 20 шт/φ75мм, 40 шт/φ50мм.
6. Максимальный шлифовальный диаметр: φ150мм.
7. Скорость оборотов нижнего круга: 0-56rpm.
8. Источника газа: 0.4~0.5MPa.
9. Главный электродвигатель: 4kW AC380/220V 1460rpm.
10. Электрический насос: 1/4HP AC380V 70L/min.
11. Габаритный размер: 1980мм×1315мм×2740мм
12. Масса: около2000 кг.

Ⅲ. Точность главной машины
1. Ровность нижнего круга менее 0.015 мм;
2. Торцевое биение нижнего круга менее 0.06 мм.
Ⅳ. Способность обработки
1. Несущая способность на единицу: 8 шт/Ф75 мм; 5 шт/Ф100 мм;
2. Несущая способность на целый круг: 40 шт/Φ75мм, 25 шт/Ф50 мм.

В нижеследующем описание станка на английском языке:

X61 640B2M-5PT Double-sided Lapping Machine

Application:
This machine is mainly used for lapping blue glass, silicon wafers, optical glass, ceramics, quartz crystal and other semi conductive materials on both sides. It also could be used for lapping other hard and fragile materials on both sides with high precision.
Main feature:
 It is controlled by PLC with PT display, which could set the working parameters, such as, pressure, time, speed, slow-down pressure and floating time, and the mode through the touching-screen.
 This machine is equipped with two motors, the upper plates system is controlled by double-acting pneumatic cylinder. It highly matched the ultrathin work-piece processing requirements.
 The designs of the machine adopt the world’s newest equipment’s feature in structure, the way of transmission and movement. It absorbs many customers’ successful experience in using. Improving the equipment’ accuracy and it is availing for fixing and maintain. The equipment’s reliability, practicability, interchangeability and operating conveniences.
 The plates could weigh themselves, in order to keep the same high efficiency unchangeable with the same polishing technical parameters (pressure, time, speed and the granularity, density and the flow rate of the slurry).
 There are twenty sets of different techniques parameter (pressure, time, speed, slow-down pressure and floating time), so that the operator could choose.
 In order to meet the different requirements, the sun gear of this machine could run not only forward, but also reverse (related to the ring gear and the low plate, selected on the human-computer interface).
 Key bought-in components are from world famous manufacturers which makes sure the machines accuracy and reliability.
Main specifications:
 Dimensions of lapping plates: φ640mm×φ235mm×30mm
 Carrier specifications: British system: Z＝108 DP＝12 α=20°
Metric system: Z＝114 M＝2 α=20°
 Thickness of work-pieces (Min): 0.20mm
 Thickness of work-pieces (Max): 30mm
 Diameter of work-pieces and capacity: φ75/20 φ50/40
 Diameter of work-pieces (max.): φ150mm
 Rotation speed of lower plate: 0～56rpm
 Air source: 0.4~0.5MPa
 Main motor: 4kW AC380V 1460rpm
 Three-phase electric pump: 1/4HP AC380V 70L/min
 Overall dimensions（L×W×H）: 1980mm×1315mm×2740mm
 Weight: about 2000kg
Machine accuracy:
 Flatness of lapping plates: ﹤0.015mm
 End face run-out of low plate: ﹤0.06mm
Machine capacity:
 One-carrier capacity: 8 pieces of φ75mm 5 pieces of φ100mm
 Total capacity: 40 pieces of /φ75mm 25 pieces of φ50mm